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BSA-DDM Complex Intensity
ByMike HI took a look back through the Melvern data I collected, particularly focusing on changes in the intensity data in the BSA-DDM solution (the previously posted plots were of number data). When I compared the peak intensities for BSA, DDM, and DDM-BSA complex I noticed that the intensity peaks fall over the same size distribution…
Update to the Cigarette Burn Report
I stripped and viewed samples from wafers 186, 185, 184 and 182. None of these samples had cigarette burns. Follow this link to the updated summary: cb_report Previously I had noticed cigarette burns (small ragged pinholes) on samples from wafers between numbers 202 and 216. All of these wafers had been stripped using a full…
Supplemental Permeability Figures
These are a couple of figures that may appear in the supplementary materials for the permeability paper. The first tries to explain that most of our permeability is due to the largest pores. The lines plotted are the cumulative number of pores at each size (blue) and the cumulative permeability (green). The lines show that…
Scalable Tent Transfer Laser Manufacturing
The NPN tenting mechanism I’ve described in a few different posts has relied solely on mechanical technique. I poke the substrate with tweezers, or delaminate it with high electrical forces, or heat it up and let it contract while in contact with each other. It would scale very poorly if we tried to make this…
AFM of SiO2 film roughness
Dave did a series of 20nm SiO2 film depositions at different temperatures (constant bias) and gave them to me to AFM. I guess he wanted to see if film roughness changed drastically over the range of ‘room temp – 400C’ in order to investigate this as a potential source of pinholes. I used a new…
Problem with copper…
There is strong evidence that the recent pinhole breakout is due to copper contamination in our process. I have attached two image – An SEM showing a cuprous creature eating one of our membranes and an EDX (Energy Dispersive X-ray?) spectra identifying it as a copper-rich silicide. This would also explain Dave’s TEM image of…