Bonding PDMS to SU-8, from URNano Workshop
This is the method Brian McIntyre developed for the recent URNano Microfluidics Workshop. Based on a polyaddition-based mechanism based on introducing amine groups onto the surface of one material and epoxy groups on another material and enabling the amine–epoxide polyaddition reaction at their closely contacted solid-to-solid interface to establish a covalent and permanent bonding presented in a paper in Polymer, vol 50, issue 23, 3 Nov 2009 pp 5358-61
The two surfaces, SU-8, and PDMS are modified to facilitate bonding. The SU-8 is ‘modified’ by not hardbaking. This is intended to maximize the dangling surface epoxy chain ends.
With the PDMS, the chain siloxane ends are modified with the addition of N forming amine groups on the surface.
Bringing two sides together at 100º C under clamping pressure for 1hr creates an irreversible bond.
