AFM of polyimide covered wafers
There is AFM images that were taken in Krauss’s lab before I left. I wasn’t able to see open pores. There were samples from two wafers (213 and 398) with deposited polymer. On samples from first wafer, the polyimide deposited very well and surface is smooth. On w398 the polyimide layer has hills which are approximately 50-70nm high, but in between the hills the surface is the same as on the first one. Polymers do that very often as I know, the surface shoud be taken care of before deposition. I will do plasma treatment next time before deposition. May be some surface chemistry. Will think about it. I will tell more when I come back.
I have troubles with inserting images now for some reason. Sorry.