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Using Alumina Deposition to Modulate Pore Size
The Cambridge Microsystems Savannah 200 atomic layer deposition (ALD) system uses a two-step chemical process that alternates pulses of water vapor and trimethylaluminum (TMA) to build a layer of Al2O3 on a silicon substate. Because of the two-step nature of the process, the film is forced to grow by successive monolayers, each with a thickness…
SepCon Permeability Tests
This is some really preliminary data that I hope to add to in the next couple of days. Yesterday I prepared 4 SepCon samples from wafer 310. I spun them at 3.3 psi for 2 hours with just PBS. I recorded the permeability, and then performed the exact same test with 3mg/mL protein in the…
DNA Filtration Part 2
Since the last post we have been working on obtaining replicates with wafer 101 chips. The goal was to show salt dependent filtration changes. These chips were different from the ones originally used in that the pores were much smaller (7-15nm diameter) and did not exhibit any merging. It was suggested that we perform an…
Bonding PDMS to SU-8, from URNano Workshop
This is the method Brian McIntyre developed for the recent URNano Microfluidics Workshop. Based on a polyaddition-based mechanism based on introducing amine groups onto the surface of one material and epoxy groups on another material and enabling the amine–epoxide polyaddition reaction at their closely contacted solid-to-solid interface to establish a covalent and permanent bonding presented in…
Initial silicon film density affects porosity
For the last three weeks, we have increased the substrate bias power from 25 W to 32 W (for both oxide and a-Si) to adress some film quality issues. I have found that it is “harder” to open pores in a film deposited at higher bias. Below are micrographs showing the difference in porosity for…
Ultrathin ~10nm npMgF2 TEM structure
I am attempting to manufacture a range of npMgF2 thicknesses as demonstrated in my recent CCD post. Yesterday, I undershot my thicknesses substantially, I believe because of construction vibrations in the building. However, this results in some of the thinnest npMgF2 structure I have ever been able to image. I was targeting 15 nm, but…