W567 Burst Pressure and Air Permeability

I recently received wafer 567 from Dave for cell culture work. It has many intact membranes but is riddled with pinholes, having only 3 pinhole-free samples. I decided to test them for air permeability and burst pressure, shown below.

I also noticed some odd features on the membrane and surrounding Si. They are circular but do not seem to be completely through the membrane like pinholes. I circled the feature in the images below.

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