W567 Burst Pressure and Air Permeability
I recently received wafer 567 from Dave for cell culture work. It has many intact membranes but is riddled with pinholes, having only 3 pinhole-free samples. I decided to test them for air permeability and burst pressure, shown below.
I also noticed some odd features on the membrane and surrounding Si. They are circular but do not seem to be completely through the membrane like pinholes. I circled the feature in the images below.




Karl,
The feature you circled looks like a contaminant, probably from the Pentane dip.
Thanks Dave. I forgot to mention this is a single slit wafer with 100um x 1000um slits.