Update of W637

Dave delivered W637, a wafer made using the sample recipe as W504, to us today. This wafer has a high occurrence of single pinholes, with only 12 samples pinhole-free. I also noticed some odd features on the membranes, shown below.

In the reflection images above, some sort of substance is on the membrane. In the top image it looks like the material has come from the pinhole. All membranes on this wafer have this residue/material; I am unsure what it is. It is not visible in transmission mode.

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One Comment

  1. There was a contamination in one of the solutions we use for cleaning (most likely pentane).  I think some of the plastic/glassware may still have traces of the contaminant.  I need to go through a do a thorough clean of all the labware we use.

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