AJA membrane

While Chris and I were in Boston we deposited our membrane stack on a patterned wafer.  It was annealed at 1000 C and then etched.  Because we didn’t have an accurate deposition rate for Silicon, we overestimated and put down 30 nm (instead of 15 nm).  Still, we can see in the TEM that pores are forming even in the thicker film.

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