| Membrane | Pore Size | Thickness | Pore Density | Porosity | Diffusive Permeability | Hydraulic Permeability |
| Nanoporous (NPN) |
60 nm | 100 nm | 1 x 1010 cm–2 | 9% – 18% | ~0.1 cm/sec [1-3] | ~ 100 mL/(min•bar•cm2) [4-6] |
| Dual Scale (NPN with patterned micropores) |
60 nm background plus 3 µm or 5 µm | 100 nm | 1 x 1010 cm–2 | 10% – 25% | > 0.1 cm/sec | > 100 mL/(min•bar•cm2) |
| Microslit | 0.5 µm, 1 µm, 2 µm, 4 µm, 8 µm | 400 nm | See Pages | See Pages | > 0.1 cm/sec | > 1 L/(min•bar•cm2) [6] |
| Microporous | 0.5 µm, 20 µm | 400 nm | 1 x 108 cm-2 | 5%, 20% | > 0.1 cm/sec | > 1 L/(min•bar•cm2) |
All membranes are made of silicon nitride
- Kim, E., Xiong, H., Striemer, C., Fang, D., Fauchet, P., McGrath, J.L., Amemiya, S. (2008), “A structure-permeability relationship of ultrathin silicon nanoporous membrane: A comparison with the nuclear envelope.” Journal of American Chemical Society, 130: 4230-4231.
- Ishimatsu, R., Kim, J., Jing, P., Striemer, C., Fang, D., Fauchet, P., McGrath, J.L. and Amemiya, S. (2010). Ion-Selective Permeability of Ultrathin Nanopore Silicon Membrane as Studied Using Nanofabricated Micropipet Probes. Analytical Chemistry 82: 7127-34
- Snyder, J.L., Clark Jr., A, Fang, D.Z., Gaborski, T.R., Striemer, C.C., Fauchet, P.M., McGrath, J.L. (2011) A theoretical and experimental analysis of molecular separations by diffusion through ultrathin nanoporous membranes J. Mem. Sci. 369:119-129
- Gaborski, T.R., Snyder, J.L., Striemer, C.C., Fang, D.Z., Hoffman, M., Fauchet, P.M., and McGrath, J.L. (2010). High performance separation of nanoparticles using ultrathin pnc-Si membranes. ACS Nano 4:6973-6981
- DesOrmeaux, J. P., Winans, J. D., Wayson, S. E., Gaborski, T. R. , Khire, T. S., Striemer, C. C., and McGrath, J. L. (2014) Nanoporous silicon nitride membranes fabricated from porous nanocrystalline silicon templates, Nanoscale 6:10798-10805
- Wright, E., Miller, J.J, Csorda, M.. Gosselin, A.R., Carter, J.A., McGrath, J.L., Latulippe, D.R., Roussie, J.A. (2020) Development of Isoporous Microslit Silicon Nitride Membranes for Sterile Filtration Applications Biotechnology & Bioengineering 117:879-885
